Directed self-assembly defectivity assessment. Part II
- Chris Bencher
- He Yi
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper
Publications
14467 results for Physical Sciences
Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy
- Chi-Chun Liu
- Jed Pitera
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperMeasurement of placement error between self-assembled polymer patterns and guiding chemical prepatterns
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperWear-resistant nanoscale silicon carbide tips for scanning probe applications
- Mark A. Lantz
- Bernd Gotsmann
- et al.
- 2012
- Advanced Functional Materials
PaperHigh strain embedded-SiGe via low temperature reduced pressure chemical vapor deposition
- Hong He
- Paul Brabant
- et al.
- 2012
- Thin Solid Films
PaperGas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers
- Manabu Shinriki
- Keith Chung
- et al.
- 2012
- Thin Solid Films
PaperEffect of thermal annealing on carbon in in-situ phosphorous-doped Si 1-xC x films
- Thomas Adam
- Nicolas Loubet
- et al.
- 2012
- Thin Solid Films
PaperIII-V/silicon photonics for short-wave infrared spectroscopy
- Gunther Roelkens
- William M. J. Green
- et al.
- 2012
- IEEE JQE
ReviewMultiplicity of steady modes of nanowire growth
- K.W. Schwarz
- Jerry Tersoff
- 2012
- Nano Letters
PaperThickness dependence of the amorphous-cubic and cubic-hexagonal phase transition temperatures of GeSbTe thin films on silicon nitride
- H.K. Peng
- K. Cil
- et al.
- 2012
- Thin Solid Films
Paper