Evolution of a 193 nm bilayer resist for manufacturing
- R.W. Kwong
- M. Khojasteh
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Paper
Publications
3605 results for Mathematical Sciences
A contact-reducing method over topography by combining the RELACS technique and bi-layer process
- Chieh-Yu Lin
- Karen Petrillo
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
PaperSoft decoding of several classes of array codes
- Mario Blaum
- John L. Fan
- et al.
- 2002
- IEEE International Symposium on Information Theory - Proceedings
PaperNonlinear modelling of periodic threshold autoregressions using TSMARS
- Peter A. W. Lewis
- Bonnie K. Ray
- 2002
- Journal of Time Series Analysis
PaperChain conformation in ultrathin polymer films
- Ronald L. Jones
- Christopher L. Soles
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
PaperA two-component nucleation model of protein hydrophobicity
- B.David Silverman
- 2002
- Journal of Theoretical Biology
PaperInterleaved prefetching
- T. Kimbrel
- 2002
- Algorithmica (New York)
PaperSecuring Threshold Cryptosystems against Chosen Ciphertext Attack
- Victor Shoup
- Rosario Gennaro
- 2002
- Journal of Cryptology
PaperFabrication challenges for next generation devices: MEMS for RF wireless communications
- David Seeger
- Jennifer Lund
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
PaperAliphatic platforms for the design of 157 nm chemically amplified resists
- Hiroshi Ito
- Hoa D. Truong
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Paper