A contact-reducing method over topography by combining the RELACS technique and bi-layer process
- Chieh-Yu Lin
- Karen Petrillo
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
3611 results for Mathematical Sciences
Application of blends and side chain Si-O copolymers as high etch resistant sub 100 nm E-beam resists
- Wu-Song Huang
- Ranee Kwong
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
PaperCarbon nanotube scanning probe for surface profiling of DUV and 193 nm photoresist pattern
- Cattien V. Nguyen
- Ramsey M. D. Stevens
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
PaperA filter bank approach for modeling and forecasting seasonal patterns
- Ta-Hsin Li
- Melvin J. Hinich
- 2002
- Technometrics
PaperComparison of sequence matching techniques for video copy detection
- Arun Hampapur
- Ki-Ho Hyun
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
PaperOptimal online algorithms for an electronic commerce money distribution system
- H. Kawazoe
- T. Shibuya
- et al.
- 2002
- Algorithmica (New York)
PaperInterleaved prefetching
- T. Kimbrel
- 2002
- Algorithmica (New York)
PaperHigh numerical aperture-imaging implications for chemically amplified photoresists
- Martha I. Sanchez
- Frances A. Houle
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
PaperNonlinear modelling of periodic threshold autoregressions using TSMARS
- Peter A. W. Lewis
- Bonnie K. Ray
- 2002
- Journal of Time Series Analysis
PaperIBM 9.2-Megapixel flat-panel display: Technology and infrastructure
- Steven L. Wright
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Paper