Surface etching and roughening in integrated processing of thermal oxides
- M. Offenberg
- M. liehr
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxygen induced adhesion degradation at metai/polyimide interface
- Da-Yuan Shih
- Nancy Klymko
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCharacterization of epitaxial thin films by x-ray diffraction
- Armin Segmuller
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCracking and delamination of coatings
- Sinjiroo Thouless
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperStudies of adhesion of metal films to polyimide
- David L. Pappas
- Jerome J. Cuomo
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperStudies of the reactive ion etching of SiGe alloys
- G.S. Oehriein
- G.M.W. Kroesen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperBallistic electron emission spectroscopy of noble metai-gap(110) interfaces
- R. Ludeke
- M. Prietsch
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperGaas surface oxidation and deoxidation using electron cyclotron resonance oxygen and hydrogen plasmas
- D.V. Podlesnik
- M.T. Schmidt
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAlkali metal chains on the GaAs(110) surface
- Inder P. Batra
- C.Y. Fong
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperStress and thermal expansion of boron-doped silicon membranes on silicon substrates
- B.S. Berry
- W.C. Pritchet
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper