Publications

3544 results for Mathematical Sciences

The estimated impact of shot noise in extreme ultraviolet lithography
- - Jonathan Cobb
  - Frances Houle
  - et al.
- 2003
- Microlithography 2003
Polyelectrolyte effects in model photoresist developer solutions: Roles of base concentration and added salts
- - Vivek M. Prabhu
  - Ronald L. Jones
  - et al.
- 2003
- Microlithography 2003
Impact of thin resist processes on post-etch LER
- - Arpan P. Mahorowala
  - Dario L. Goldfarb
  - et al.
- 2003
- Microlithography 2003
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Lithography 2003
X-ray absorption spectroscopy to probe interfacial issues in photolithography
- - Joseph L. Lenhart
  - Daniel A. Fischer
  - et al.
- 2003
- Microlithography 2003
Highly etch selective spin-on bottom antireflective coating for use in 193 nm lithography and beyond
- - Dirk Pfeiffer
  - Arpan Mahorowala
  - et al.
- 2003
- Microlithography 2003
Deprotection volume characteristics and line edge morphology in chemically amplified resists
- - Ronald L. Jones
  - Tengjiao Hu
  - et al.
- 2003
- Microlithography 2003
Rational design in cyclic olefin resists for sub-100nm lithography
- - Wenjie Li
  - P. Rao Varanasi
  - et al.
- 2003
- Microlithography 2003
High flexibility scalable image coding
- - Pascal Frossard
  - Pierre Vandergheynst
  - et al.
- 2003
- VCIP 2003
Hardmask technology for sub-100 nm lithographic imaging
- - Katherina Babich
  - Arpan P. Mahorowala
  - et al.
- 2003
- Microlithography 2003