Across wafer etch rate uniformity in a high density plasma reactor: Experiment and modeling
- M. Surendra
- C.R. Guarnieri
- et al.
- 1995
- Applied Physics Letters
Publications
2351 results at Applied Physics Letters
Influence of misfit dislocations on the surface morphology of Si1-xGex films
- M.A. Lutz
- R.M. Feenstra
- et al.
- 1995
- Applied Physics Letters
Near band-edge photoluminescence in relaxed Si1-xGex layers
- L. Tilly
- P.M. Mooney
- et al.
- 1995
- Applied Physics Letters
Transport and magnetic properties of in situ grown thin-film La-Y-Ca-Mn-O
- J.Z. Sun
- L. Krusin-Elbaum
- et al.
- 1995
- Applied Physics Letters
Polymeric electro-optic Mach-Zehnder switches
- J.I. Thackara
- J.C. Chon
- et al.
- 1995
- Applied Physics Letters
Quantitative measurement of the stress transfer function in nickel/polyimide thin film/copper thin film structures
- L.S. Schadler
- I.C. Noyan
- 1995
- Applied Physics Letters
Formation of Al-Cu via/interconnect by low-pressure collimated sputtering
- R.V. Joshi
- H.M. Dalal
- et al.
- 1995
- Applied Physics Letters
Nanocrystal seeding: A low temperature route to polycrystalline Si films
- J.R. Heath
- S. Gates
- et al.
- 1994
- Applied Physics Letters
Thermal stability and electrical properties of hydrogenated amorphous carbon film
- A.C. Callegari
- D.A. Buchanan
- et al.
- 1994
- Applied Physics Letters
Method for imaging sidewalls by atomic force microscopy
- Yves Martin
- H. Kumar Wickramasinghe
- 1994
- Applied Physics Letters