Publications

3543 results for Mathematical Sciences

Dark field double dipole lithography (DDL) for 45nm node and beyond
- - Stephen Hsu
  - Martin Burkhardt
  - et al.
- 2006
- Photomask and Next-Generation Lithography Mask Technology 2006
Laws of large numbers and functional central limit theorems for generalized semi-Markov processes
- - Peter W. Glynn
  - Peter J. Haas
- 2006
- Stochastic Models
Digital video surveillance platform based on cell processor and H.264 video compression
- - V. Sheinin
  - Lascoe A. Allman
  - et al.
- 2006
- SPIE Defense + Security 2006
Spoken document retrieval from call-center conversations
- - Jonathan Mamou
  - David Carmel
  - et al.
- 2006
- SIGIR 2006
Functional coefficient autoregressive models for vector time series
- - Jane L. Harvill
  - Bonnie K. Ray
- 2006
- CSDA
Probability and program-size for functions
- - Gregory Chaitin
- 2006
- Fundamenta Informaticae
Global optimization of the illumination distribution to maximize integrated process window
- - Alan E. Rosenbluth
  - Nakgeuon Seong
- 2006
- SPIE Advanced Lithography 2006
Lithography process optimization using linear superposition of commonly available illumination modes
- - Michael M. Crouse
  - Yasri Yudhistira
  - et al.
- 2006
- SPIE Advanced Lithography 2006
DFM requirements and solution roadmaps: The multi-layer approach
- - Juan Antonio Carballo
  - Sani Nassif
- 2006
- SPIE Advanced Lithography 2006
Characterization of imaging performance for immersion lithography at NA=0.93
- - Dario Gil
  - Jaione Tirapu-Azpiroz
  - et al.
- 2006
- SPIE Advanced Lithography 2006