Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We present subroutines for the Cholesky factorization of a positive-definite symmetric matrix and for solving corresponding sets of linear equations. They exploit cache memory by using the block hybrid format proposed by the authors in a companion article. The matrix is packed into n(n + 1)/2 real variables, and the speed is usually better than that of the LAPACK algorithm that uses full storage (n2 variables). Included are subroutines for rearranging a matrix whose upper or lower-triangular part is packed by columns to this format and for the inverse rearrangement. Also included is a kernel subroutine that is used for the Cholesky factorization of the diagonal blocks since it is suitable for any positive-definite symmetric matrix that is small enough to be held in cache. We provide a comprehensive test program and simple example programs. © 2007 ACM.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
Andrew Skumanich
SPIE Optics Quebec 1993
T. Graham, A. Afzali, et al.
Microlithography 2000