On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- E.A. Irene
- N.J. Chou
- et al.
- 2019
- JES
Paper
Publications
509 results at JES
Pre- and Postepitaxial Gettering of Oxidation and Epitaxial Stacking Faults in Silicon
- M.C. Chen
- V.J. Silvestri
- et al.
- 2019
- JES
PaperPolymerization of Aromatic Silanes in RF Plasmas
- Ivan Haller
- 2019
- JES
PaperEffect of Plating Parameters on Electrodeposition of NiFe
- J. Horkans
- 2019
- JES
PaperInfluence of the Growth Conditions of Al2O3 Passivating Layers on the Corrosion of Aluminum Films in Water
- J. Grimblot
- J.M. Eldridge
- 2019
- JES
PaperParameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- L.M. Ephrarh
- D.J. Dimaria
- et al.
- 2019
- JES
PaperEffects of Oxidation on the Atmospheric Corrosion of Permalloy Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
PaperSilicon Oxidation Studies: Measurement of the Diffusion of Oxidant in SiO2 Films
- E.A. Irene
- 2019
- JES
PaperFeature-Size Dependence of Etch Rate in Reactive Ion Etching
- Young H. Lee
- Zhen H. Zhou
- 2019
- JES
PaperAcceleration Factors for the Decomposition of Thermally Grown SiO2 Films
- S.I. Raider
- 2019
- JES
Paper