Low temperature metal organic chemical vapor deposition of aluminum oxide thin films for advanced CMOS gate dielectric applications
- Spyridon Skordas
- Filippos Papadatos
- et al.
- 2002
- MRS Proceedings 2002
Publications
3532 results for Materials Discovery
Terabit density cobalt nanowire arrays with tunable magnetic properties
- Andrei Ursache
- Mustafa Bal
- et al.
- 2002
- MRS Proceedings 2002
In-situ studies of silicide formation in Ti-Ta bilayer thin films on poly-Si
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- MRS Proceedings 2002
Crystallographic texture and phase metrology during damascene copper processing
- K.J. Kozaczek
- P. DeHaven
- et al.
- 2002
- MRS Proceedings 2002
Dynamic AFM using the FM technique with constant excitation amplitude
- B. Gotsmann
- H. Fuchs
- 2002
- Applied Surface Science
8 Gb/s CMOS compatible monolithically integrated silicon optical receiver
- Sebastian M. Csutak
- Jeremy D. Schaub
- et al.
- 2002
- OFC 2002
Kinetic effects in heteroepitaxial growth
- 2002
- Applied Surface Science
Defect-tolerant and directional wet-etch systems for using monolayers as resists
- Matthias Geissler
- Heinz Schmid
- et al.
- 2002
- Langmuir
Asymmetric block copolymers with homopolymers: Routes to multiple length scale nanostructures
- U. Jeong
- H.C. Kim
- et al.
- 2002
- Advanced Materials
Synthesis and characterization of polypyrrole-graft-poly(ε-caprolactone) copolymers: New electrically conductive nanocomposites
- D. Mecerreyes
- R. Stevens
- et al.
- 2002
- Synthetic Metals