Patterning of N:Ge2Sb2Te5 films and the characterization of etch induced modification for non-volatile phase change memory applications
- E. Joseph
- T.D. Happ
- et al.
- 2008
- VLSI-TSA 2008
Publications
124 results for Yu Zhu
Write strategies for 2 and 4-bit multi-level phase-change memory
- T. Nirschl
- J.B. Philipp
- et al.
- 2007
- IEDM 2007
Novel lithography-independent pore phase change memory
- M. Breitwisch
- T. Nirschl
- et al.
- 2007
- VLSI Technology 2007
Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemes
- Yu Zhu
- Kathleen A. Dunn
- et al.
- 2007
- Journal of Materials Research