Strain relaxation in silicon-germanium microstructures observed by resonant tunneling spectroscopy
- A. Zaslavsky
- K.R. Milkove
- et al.
- 1995
- Applied Physics Letters
Paper
Publications
38 results for Y.H. Lee
Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- S.J. Wind
- Y. Taur
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperPlasma enhanced chemical vapor deposition of TiO2 in microwave-radio frequency hybrid plasma reactor
- Young H. Lee
- Kevin K. Chan
- et al.
- 1995
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperFabrication of three-terminal resonant tunneling devices in silicon-based material
- A. Zaslavsky
- K.R. Milkove
- et al.
- 1994
- Applied Physics Letters
PaperElectrical characteristics of ultra-thin multi-layers of poly-Si and silicon dioxide
- K.K. Chan
- Y.H. Lee
- et al.
- 1994
- MRS Fall Meeting 1994
Conference paperSelective growth of Si/SiGe resonant tunneling diodes by atmospheric pressure chemical vapor deposition
- A. Zaslavsky
- D.A. Grützmacher
- et al.
- 1992
- Applied Physics Letters
PaperSurface damage threshold of Si and Si02 in electron-cyclotron-resonance plasmas
- Young H. Lee
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperChemical sputtering of Al2O3 by fluorine-containing plasmas excited by electron cyclotron resonance
- Y.H. Lee
- Z.H. Zhou
- et al.
- 1990
- Journal of Applied Physics
PaperQuantum fluctuations in n+ GaAs wires with invasive probes
- W. Hansen
- T.P. Smith III
- et al.
- 1990
- Surface Science
PaperRie-induced damage and contamination in silicon
- Young H. Lee
- G.S. Oehrlein
- et al.
- 1989
- Radiation Effects and Defects in Solids
Paper