Defect generation in field-effect transistors under channel-hot-electron stressD.J. DiMaria2000Journal of Applied Physics
Breakdown measurements of ultra-thin SiO2 at low voltageJ.H. StathisA. Vayshenkeret al.2000VLSI Technology 2000
Electron energy dependence of metal-oxide-semiconductor degradationD.J. DiMaria1999Applied Physics Letters
Defect generation under substrate-hot-electron injection into ultrathin silicon dioxide layersD.J. DiMaria1999Journal of Applied Physics
Non-Arrhenius temperature dependence of reliability in ultrathin silicon dioxide filmsD.J. DiMariaJ.H. Stathis1999Applied Physics Letters
Oxide scaling limit for future logic and memory technologyJ.H. StathisD.J. DiMaria1999Microelectronic Engineering
Currents, surface potentials, and defect generation in 1.2-1.5 nm oxide MOSFETsS. TiwariJ.J. Welseret al.1998DRC 1998
Ultimate limit for defect generation in ultra-thin silicon dioxideD.J. DiMariaJ.H. Stathis1997Applied Physics Letters
Explanation for the oxide thickness dependence of breakdown characteristics of metal-oxide-semiconductor structuresD.J. DiMariaJ.H. Stathis1997Applied Physics Letters