Publications

122 results for J.M.E. Harper

Low Energy Ion Beam Etching
- - J.M.E. Harper
  - J.J. Cuomo
  - et al.
- 2019
- JES
Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition
- - B.O. Johansson
  - H.T.G. Hentzell
  - et al.
- 2011
- Journal of Materials Research
250-Å linewidths with PMMA electron resist
- - A.N. Broers
  - J.M.E. Harper
  - et al.
- 2008
- Applied Physics Letters
Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films
- - C. Lavoie
  - C. Detavernier
  - et al.
- 2006
- Microelectronic Engineering
On the use of alloying elements for Cu interconnect applications
- - K. Barmak
  - C. Cabral
  - et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Resistivity-temperature behavior of dilute Cu(Ir) and Cu(W) alloy films
- - Katayun Barmak
  - Jr. Cabral
  - et al.
- 2005
- Journal of Materials Research
Evaluation of thermal stability for CMOS gate metal materials
- - C. Cabral Jr.
  - C. Lavoie
  - et al.
- 2004
- JES
Evolution of microstructure in Ti-Ta bilayer thin films on polycrystalline-Si and Si(001)
- - A.S. Özcan
  - K.F. Ludwig Jr.
  - et al.
- 2004
- Thin Solid Films
Interfacial reactions between Al and RuO₂, MoO_x and WN_x diffusion barriers on Si
- - S.-E. Hörnström
  - A. Charai
  - et al.
- 2004
- Surface and Interface Analysis
Effects of failure criteria on the lifetime distribution of dual-damascene Cu line/via on W
- - R.F. Liu
  - C.-K. Hu
  - et al.
- 2004
- Journal of Applied Physics