Auger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2014
- Japanese Journal of Applied Physics
Publications
4 results for J.G. Cahill
Auger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2003
- Applied Physics Letters
Effects of HCl and Cl2 additions on silicon oxidation kinetics
- Y.J. van der Meulen
- J.G. Cahill
- 1974
- Journal of Electronic Materials
Preparation and properties of silicon-cadmium selenide p-n heterojunctions
- Y.J. van der Meulen
- J.G. Cahill
- et al.
- 1972
- Thin Solid Films