Silicon Oxidation Studies: Analysis of SiO2 Film Growth Data
- E.A. Irene
- Y.J. van der Meulen
- 2019
- JES
Paper
Publications
8 results for Y.J. van der Meulen
Properties of SiO2 Grown in the Presence of HCl or Cl2
- Y.J. van der Meulen
- C.M. Osburn
- et al.
- 2019
- JES
PaperAuger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2014
- Japanese Journal of Applied Physics
PaperAuger analysis of chlorine in "hCl- or Cl2-grown" SiO2 films
- N.J. Chou
- C.M. Osburn
- et al.
- 2003
- Applied Physics Letters
PaperAuger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2003
- Applied Physics Letters
PaperEffects of HCl and Cl2 additions on silicon oxidation kinetics
- Y.J. van der Meulen
- J.G. Cahill
- 1974
- Journal of Electronic Materials
PaperPreparation and properties of silicon-cadmium selenide p-n heterojunctions
- Y.J. van der Meulen
- J.G. Cahill
- et al.
- 1972
- Thin Solid Films
PaperAnalysis of ultrathin oxide growth on indium
- J.M. Eldridge
- Y.J. Van der Meulen
- et al.
- 1972
- Thin Solid Films
Paper