Resolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
- Alec N. Broers
- 2019
- JES
Paper
Publications
29 results for A.N. Broers
High‐resolution surface scanning electron microscopy of mineralized tissues
- A. Boyde
- A.N. Broers
- 2011
- Journal of Microscopy
PaperElectron-beam fabrication of 80-Å metal structures
- A.N. Broers
- W. Molzen
- et al.
- 2008
- Applied Physics Letters
Paper250-Å linewidths with PMMA electron resist
- A.N. Broers
- J.M.E. Harper
- et al.
- 2008
- Applied Physics Letters
PaperJosephson effect in Nb nanobridges
- R.B. Laibowitz
- A.N. Broers
- et al.
- 2008
- Applied Physics Letters
PaperNiobium nanobridge dc SQUID
- Richard F. Voss
- Robert B. Laibowitz
- et al.
- 2008
- Applied Physics Letters
PaperElectron gun using long-life lanthanum hexaboride cathode
- A.N. Broers
- 2004
- Journal of Applied Physics
PaperA new high resolution reflection scanning electron microscope
- A.N. Broers
- 2003
- Review of Scientific Instruments
PaperLanthanum hexaboride electron emitter
- H. Ahmed
- A.N. Broers
- 2003
- Journal of Applied Physics
Paper1.75-GHz acoustic-surface-wave transducer fabricated by an electron beam
- A.N. Broers
- E.G. Lean
- et al.
- 2003
- Applied Physics Letters
Paper