Impact of charge trapping on the voltage acceleration of TDDB in metal gate/high-k n-channel MOSFETsA. KerberA. Vayshenkeret al.2010IRPS 2010
High-performance high-κ/metal gates for 45nm CMOS and beyond with gate-first processingM. ChudzikB. Doriset al.2007VLSI Technology 2007
High performance transistors featured in an aggressively scaled 45nm bulk CMOS technologyZ. LuoN. Rovedoet al.2007VLSI Technology 2007
High performance 45-nm SOI technology with enhanced strain, porous low-k BEOL, and immersion lithographyS. NarasimhaK. Onishiet al.2006IEDM 2006
High performance and low power transistors integrated in 65nm bulk CMOS technologyZ. LuoA. Steegenet al.2004IEDM 2004
Growth and scaling of oxide conduction after breakdownBarry P. LinderJames H. Stathiset al.2003IRPS 2003
A high performance 90 nm SOI technology with 0.992 μm2 6T-SRAM cellMukesh KhareS. Kuet al.2002IEDM 2002
Voltage dependence of hard breakdown growth and the reliability implication in thin dielectricsBarry P. LinderSalvatore Lombardoet al.2002IEEE Electron Device Letters
The effect of change of voltage acceleration on temperature activation of oxide breakdown for ultrathin oxidesE. WuJ.M. McKennaet al.2001IEEE Electron Device Letters