Publications

94 results for Fenton R. McFeely

Low-temperature reflow anneals of Cu on Ru
- - C.-C. Yang
  - Fenton R. McFeely
  - et al.
- 2011
- IEEE Electron Device Letters
A simple in situ method to detect graphene formation at SiC surfaces
- - Satoshi Oida
  - James B. Hannon
  - et al.
- 2011
- Applied Physics Letters
X-ray photoelectron spectroscopy study on Fe and Co catalysts during the first stages of ethanol chemical vapor deposition for single-walled carbon nanotube growth
- - Satoshi Oida
  - Fenton R. McFeely
  - et al.
- 2011
- Journal of Applied Physics
Decoupling graphene from SiC(0001) via oxidation
- - Satoshi Oida
  - Fenton R. McFeely
  - et al.
- 2010
- Physical Review B - CMMP
Selective chemical vapor deposition-grown Ru for Cu interconnect capping applications
- - C.-C. Yang
  - Fenton R. McFeely
  - et al.
- 2010
- Electrochemical and Solid-State Letters
pFET V _t control with HfO ₂/TiN/poly-Si gate stack using a lateral oxygenation process
- - B. Cartier
  - M. Steen
  - et al.
- 2009
- VLSI Technology 2009
Integration and reliability of CVD Ru Cap for Cu/Low-k development
- - C.-C. Yang
  - D. Edelstein
  - et al.
- 2009
- IITC 2009
Physical, electrical, and reliability characterization of Ru for Cu interconnects
- - C.-C. Yang
  - T. Spooner
  - et al.
- 2006
- IITC 2006
HfO ₂/metal stacks: Determination of energy level diagram, work functions & their dependence on metal deposition
- - S. Zafar
  - V. Narayanan
  - et al.
- 2005
- VLSI Technology 2005
Role of oxygen vacancies in V_FB/V_t stability of pFET metals on HfO₂
- - E. Cartier
  - F.R. McFeely
  - et al.
- 2005
- VLSI Technology 2005