Patterned cracks improve yield in the release of compliant microdevices from silicon-on-insulator wafers
- G.C. Hill
- J.I. Padovani
- et al.
- 2011
- JMM
Paper
Publications
18 results for B.W. Chui
Patterned cracks in the buried oxide layer improve yield in device release from soi wafers
- G.C. Hill
- J.I. Padovani
- et al.
- 2011
- MEMS 2011
Conference paperMagnetic resonance force microscopy of nuclear spins: Detection and manipulation of statistical polarization
- H.J. Mamin
- R. Budakian
- et al.
- 2005
- Physical Review B - CMMP
PaperCreating order from random fluctuations in small spin ensembles
- R. Budakian
- H.J. Mamin
- et al.
- 2005
- Science
PaperSingle spin detection by magnetic resonance force microscopy
- D. Rugar
- R. Budakian
- et al.
- 2004
- Nature
PaperDetection and manipulation of statistical polarization in small spin ensembles
- H.J. Mamin
- R. Budakian
- et al.
- 2003
- Physical Review Letters
Paper"Feeling" the noise in nanoscale systems: Studies based on ultrasensitive force detection
- D. Rugar
- R. Budakian
- et al.
- 2003
- SPIE International Symposium on Fluctuations and Noise 2003
Conference paper"Feeling" the noise in nanoscale systems: Studies based on ultrasensitive force detection
- D. Rugar
- R. Budakian
- et al.
- 2003
- SPIE International Symposium on Fluctuations and Noise 2003
Conference paper"Feeling" the noise in nanoscale systems: Studies based on ultrasensitive force detection
- D. Rugar
- R. Budakian
- et al.
- 2003
- SPIE International Symposium on Fluctuations and Noise 2003
Conference paperMass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy
- B.W. Chui
- Y. Hishinuma
- et al.
- 2003
- TRANSDUCERS 2003
Conference paper