Quantitative nanoscale imaging of lattice distortions in epitaxial semiconductor heterostructures using nanofocused X-ray Bragg projection ptychography
- S.O. Hruszkewycz
- M.V. Holt
- et al.
- 2012
- Nano Letters
Paper
Publications
14 results for I. McNulty
Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm
- Brian Abbey
- Garth J. Williams
- et al.
- 2008
- Applied Physics Letters
PaperImaging material components of an integrated circuit interconnect
- Zachary H. Levine
- Steven Grantham
- et al.
- 2003
- Journal of Applied Physics
PaperNanometer precision metrology of submicron Cu/SiO2 interconnects using fluorescence and transmission x-ray microscopy
- Guangyong Xu
- D.E. Eastman
- et al.
- 2003
- Journal of Applied Physics
PaperQuantitative nanoscale metrology study of Cu/SiO2 interconnect technology using transmission x-ray microscopy
- X. Su
- C.B. Stagarescu
- et al.
- 2000
- Applied Physics Letters
PaperObservation of x-ray speckle by coherent scattering at grazing incidence
- Z. Cai
- B. Lai
- et al.
- 1994
- Physical Review Letters
PaperHigh-resolution imaging by fourier transform X-ray holography
- Ian McNulty
- Janos Kirz
- et al.
- 1992
- Science
PaperThe scanning transmission microscope at the NSLS
- Harvey Rarback
- Chris Buckley
- et al.
- 1990
- Nuclear Inst. and Methods in Physics Research, A
PaperCoherent radiation for X-ray imaging—the soft x-ray undulator and the x1a beamline at the NSLS
- H. Rarback
- C. Buckley
- et al.
- 1990
- Journal of X-Ray Science and Technology
PaperX-ray Microscopy with the NSLS Soft X-ray Undulator
- Janos Kirz
- Harald Ade
- et al.
- 1990
- Physica Scripta
Paper