Publications

10 results for Gregory N. Parsons

Simultaneous Co-localized TiO₂ Etching and W Atomic Layer Deposition Using WF₆ as a Dual-Functional Reactant
- - Hannah R. M. Margavio
  - Noel Arellano
  - et al.
- 2024
- Chemistry of Materials
History of atomic layer deposition and its relationship with the American Vacuum Society
- - Gregory N. Parsons
  - Jeffrey W. Elam
  - et al.
- 2013
- JVSTA
Progress in large area selective silicon deposition for TFT/LCD applications
- - J.H. Souk
  - G.N. Parsons
- 1994
- MRS Spring Meeting 1994
Progress in large area selective silicon deposition for TFT/LCD applications
- - Jun H. Souk
  - Gregory N. Parsons
- 1994
- MRS Spring Meeting 1994
Microstructural evolution and substrate selectivity in PECVD μc-Si
- - G.N. Parsons
  - J.J. Boland
  - et al.
- 1992
- Symposium on Dynamics in Small Confining Systems 1992
Selective Deposition and Bond Strain Relaxation in Silicon PECVD Using Time Modulated Silane Flow
- - Gregory N. Parsons
  - John J. Boland
  - et al.
- 1992
- Japanese Journal of Applied Physics
Bond selectivity in silicon film growth
- - John J. Boland
  - Gregory N. Parsons
- 1992
- Science
Enhanced Mobility Top-Gate Amorphous Silicon Thin-Film Transistor with Selectively Deposited Source/Drain Contacts
- - G.N. Parsons
- 1992
- IEEE Electron Device Letters
Selective deposition of silicon by plasma-enhanced chemical vapor deposition using pulsed silane flow
- - G.N. Parsons
- 1991
- Applied Physics Letters
Low hydrogen content stoichiometric silicon nitride films deposited by plasma-enhanced chemical vapor deposition
- - G.N. Parsons
  - J.H. Souk
  - et al.
- 1991
- Journal of Applied Physics