Analysis of an extreme low-κ organosilicate dielectric film exposed to representative plasmas and to a restorative process
- M. Colburn
- S.V. Nitta
- et al.
- 2003
- AMC 2003
Publications
48 results for E. Simonyi
Processing dependent thermal conductivity of nanoporous silica xerogel films
- Anurag Jain
- Svetlana Rogojevic
- et al.
- 2002
- Journal of Applied Physics
Effects of processing history on the modulus of silica xerogel films
- Anurag Jain
- Svetlana Rogojevic
- et al.
- 2001
- Journal of Applied Physics
Porous silica materials as low-k dielectrics for electronic and optical interconnects
- A. Jain
- S. Rogojevic
- et al.
- 2001
- Thin Solid Films
Opportunities and challenges in ultra low k dielectrics for interconnect applications
- S. Purushothaman
- S.V. Nitta
- et al.
- 2001
- Technical Digest-International Electron Devices Meeting
Characterization of spin -on glasses by microindentation
- E. Simonyi
- K.-W. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Properties development during curing of low dielectric-constant spin-on glasses
- R.F. Cook
- E. Liniger
- et al.
- 1998
- MRS Spring Meeting 1998
Ta and TaN adhesion to high-temperature fluorinated polyimides. Surface and interface chemistry
- K.-W. Lee
- E. Simonyi
- et al.
- 1998
- Journal of Adhesion Science and Technology
Polymeric organic-inorganic hybrid nanocomposites: Preparation of polyimide-modified poly(silsesquioxane) using functionalized poly(amic acid alkyl ester) precursors
- J.L. Hedrick
- H.J. Cha
- et al.
- 1997
- Macromolecules
Nanoscopically engineered organic-inorganic hybrids as low dielectric constant, high modulus insulating materials for microelectronic applications
- J.L. Hedrick
- R.D. Miller
- et al.
- 1997
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry