Conference paper
NEW MATERIALS FOR HIGH RESOLUTION OPTICAL LITHOGRAPHY.
R.D. Miller
ACS Fall 1984
Paper
Nanoscopically engineered organic-inorganic hybrids as low dielectric constant, high modulus insulating materials for microelectronic applications
Related
M. Trollsås, J.L. Hedrick, et al.
Macromolecules
R.D. Miller, O. Reiser
Journal of Heterocyclic Chemistry
Conference paper
Polyimides with reduced dielectric anisotropy
Jeff W. Labadie, H. Lee, et al.
ECTC 1993