Publications

188 results for Devendra Sadana

Cracking behavior of evaporated amorphous silicon films
- - Jeehwan Kim
  - Daniel Inns
  - et al.
- 2010
- Thin Solid Films
Investigation on critical failure thickness of hydrogenated/nonhydrogenated amorphous silicon films
- - Jeehwan Kim
  - Daniel Inns
  - et al.
- 2010
- Journal of Applied Physics
Challenges and solutions of extremely thin SOI (ETSOI) for CMOS scaling to 22nm node and beyond
- - Kangguo Cheng
  - Ali Khakifirooz
  - et al.
- 2010
- CSTIC 2010
> 10²⁰ cm^-3 n-doping in Ge by Sb/P co-implants: n⁺/p Diodes with improved rectification
- - Jeehwan Kim
  - Stephen W. Bedell
  - et al.
- 2010
- ECS Transactions
Applications of epitaxy for semiconductor technology
- - Devendra Sadana
  - Stephen W. Bedell
  - et al.
- 2010
- ECS Transactions
Low-temperature epitaxial growth of Si, SiGe, Ge, and SiC in a 300mm UHV/CVD reactor
- - Thomas N. Adam
  - Stephen W. Bedell
  - et al.
- 2010
- ECS Transactions
Sputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs
- - Marinus Hopstaken
  - Dirk Pfeiffer
  - et al.
- 2010
- ECS Transactions
300mm cold-wall UHV/CVD reactor for low-temperature epitaxial (100) silicon
- - Thomas N. Adam
  - Stephen W. Bedell
  - et al.
- 2010
- ECS Transactions
Strain engineering for fully-depleted SOI devices
- - Ali Khakifirooz
  - Pranita Kulkarni
  - et al.
- 2010
- ECS Transactions
Extremely thin SOI (ETSOI) CMOS with record low variability for low power system-on-chip applications
- - K. Cheng
  - A. Khakifirooz
  - et al.
- 2009
- IEDM 2009