Thin film Ni-Si solid-state reactions: Phase formation sequence on amorphized Si
- Pierre Turcotte-Tremblay
- Matthieu Guihard
- et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
12 results for Simon Gaudet
Three dimensional reciprocal space measurement by x-ray diffraction using linear and area detectors: Applications to texture and defects determination in oriented thin films and nanoprecipitates
- Simon Gaudet
- Koen De Keyser
- et al.
- 2013
- JVSTA
PaperMnP nanoclusters embedded in GaP epitaxial films grown by organometallic vapor-phase epitaxy: A reciprocal space mapping and transmission electron microscopy study
- Samuel Lambert-Milot
- Simon Gaudet
- et al.
- 2012
- JVSTA
PaperThe thermally-induced reaction of thin Ni films with Si: Effect of the substrate orientation
- Simon Gaudet
- Patrick Desjardins
- et al.
- 2011
- Journal of Applied Physics
PaperExploitation of a self-limiting process for reproducible formation of ultrathin Ni1-x Ptx silicide films
- Zhen Zhang
- Bin Yang
- et al.
- 2010
- Applied Physics Letters
PaperMetastable phase formation during the reaction of Ni films with Si(001): The role of texture inheritance
- Simon Gaudet
- C. Coia
- et al.
- 2010
- Journal of Applied Physics
PaperMorphological stability and specific resistivity of sub-10 nm silicide films of Ni1-x Ptx on Si substrate
- Zhen Zhang
- Shi Li Zhang
- et al.
- 2010
- Applied Physics Letters
PaperControlling nickel silicide phase formation by Si implantation damage
- M. Guihard
- P. Turcotte-Tremblay
- et al.
- 2009
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
PaperIn situ x-ray diffraction study of metal induced crystallization of amorphous germanium
- W. Knaepen
- S. Gaudet
- et al.
- 2009
- Journal of Applied Physics
PaperReaction of thin Ni films with Ge: Phase formation and texture
- S. Gaudet
- C. Detavernier
- et al.
- 2006
- Journal of Applied Physics
Paper