Process trace analytics for process development
- Robert J. Baseman
- Fateh A. Tipu
- et al.
- 2021
- SPIE Advanced Lithography 2021
Conference paper
Publications
16 results for Robert J. Baseman
Continuous prediction of manufacturing performance throughout the production lifecycle
- Sholom M. Weiss
- Amit Dhurandhar
- et al.
- 2014
- Journal of Intelligent Manufacturing
PaperA unified framework for outlier detection in trace data analysis
- Zhiguo Li
- Robert J. Baseman
- et al.
- 2014
- IEEE Trans Semicond Manuf
PaperImproving quality control by early prediction of manufacturing outcomes
- Sholom M. Weiss
- Amit Dhurandhar
- et al.
- 2013
- KDD 2013
Conference paperA unified outlier detection method for trace data analysis in semiconductor manufacturing
- Zhiguo Li
- Robert J. Baseman
- et al.
- 2013
- IIE-AC 2013
Conference paperVirtual metrology and run-to-run control in semiconductor manufacturing
- Yada Zhu
- Robert J. Baseman
- et al.
- 2012
- ISSAT-RQD 2012
Conference paperData analytics and stochastic modeling in a semiconductor fab
- Sugato Bagchi
- Robert J. Baseman
- et al.
- 2010
- Appl Stochastic Models Bus Indus
ReviewRule-based data mining for yield improvement in semiconductor manufacturing
- Sholom M. Weiss
- Robert J. Baseman
- et al.
- 2009
- Applied Intelligence
PaperHighly oriented pyrolytic graphite as a reference surface for optically stimulated electron emission surface quality monitors
- Robert J. Baseman
- J. Samuel Batchelder
- 1993
- Review of Scientific Instruments
PaperParticulates reduction in laser-ablated YBa2Cu3O 7-δ thin films by laser-induced plume heating
- G. Koren
- R.J. Baseman
- et al.
- 1990
- Applied Physics Letters
Paper