Publications

16 results for Robert J. Baseman

Process trace analytics for process development
- - Robert J. Baseman
  - Fateh A. Tipu
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Continuous prediction of manufacturing performance throughout the production lifecycle
- - Sholom M. Weiss
  - Amit Dhurandhar
  - et al.
- 2014
- Journal of Intelligent Manufacturing
A unified framework for outlier detection in trace data analysis
- - Zhiguo Li
  - Robert J. Baseman
  - et al.
- 2014
- IEEE Trans Semicond Manuf
Improving quality control by early prediction of manufacturing outcomes
- - Sholom M. Weiss
  - Amit Dhurandhar
  - et al.
- 2013
- KDD 2013
A unified outlier detection method for trace data analysis in semiconductor manufacturing
- - Zhiguo Li
  - Robert J. Baseman
  - et al.
- 2013
- IIE-AC 2013
Virtual metrology and run-to-run control in semiconductor manufacturing
- - Yada Zhu
  - Robert J. Baseman
  - et al.
- 2012
- ISSAT-RQD 2012
Data analytics and stochastic modeling in a semiconductor fab
- - Sugato Bagchi
  - Robert J. Baseman
  - et al.
- 2010
- Appl Stochastic Models Bus Indus
Rule-based data mining for yield improvement in semiconductor manufacturing
- - Sholom M. Weiss
  - Robert J. Baseman
  - et al.
- 2009
- Applied Intelligence
Highly oriented pyrolytic graphite as a reference surface for optically stimulated electron emission surface quality monitors
- - Robert J. Baseman
  - J. Samuel Batchelder
- 1993
- Review of Scientific Instruments
Particulates reduction in laser-ablated YBa₂Cu₃O _7-δ thin films by laser-induced plume heating
- - G. Koren
  - R.J. Baseman
  - et al.
- 1990
- Applied Physics Letters