Publications

113 results for Michel Despont

Microcolumn based low energy e-beam writing
- - C. Stebler
  - M. Despont
  - et al.
- 1996
- Microelectronic Engineering
Local electrochemical oxidation/reduction: First step towards a new lithography?
- - Jean-Pierre Locquet
  - Frédéric Arrouy
  - et al.
- 1995
- Applied Physics Letters
Microfabrication of lenses of a miniaturized electron column
- - M. Despont
  - U. Staufer
  - et al.
- 1995
- Microelectronic Engineering