High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1998
- Sensors and Actuators, A: Physical
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113 results for Michel Despont
Making gold nanostructures using self-assembled monolayers and a scanning tunneling microscope
- E. Delamarche
- A.C.F. Hoole
- et al.
- 1997
- Journal of Physical Chemistry B
High-yield wafer chuck for single-sided wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- TRANSDUCERS 1997
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
- M. Despont
- H. Lorenz
- et al.
- 1997
- MEMS 1997
Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- Microelectronic Engineering
Local electrochemical oxidation/reduction: First step towards a new lithography?
- Jean-Pierre Locquet
- Frédéric Arrouy
- et al.
- 1996
- Applied Physics Letters
Fabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding
- M. Despont
- H. Gross
- et al.
- 1996
- Sensors and Actuators, A: Physical
Secondary electron imaging by means of a microfabricated electron column
- C. Stebler
- M. Despont
- et al.
- 1996
- Journal de Physique III
Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns
- Michel Despont
- Gilles Beljakovic
- et al.
- 1996
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering