Real-space strain mapping of SOI features using microbeam X-ray diffraction
- Conal E. Murray
- S. Polvino
- et al.
- 2008
- Powder Diffraction
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116 results for Conal Murray
Synchrotron microbeam x-ray radiation damage in semiconductor layers
- Sean M. Polvino
- Conal E. Murray
- et al.
- 2008
- Applied Physics Letters
Effects of patterned, stressed SiN overlayers on Si solid phase epitaxy
- K.L. Saenger
- K.E. Fogel
- et al.
- 2008
- Applied Physics Letters
Importance of BEOL modeling in single event effect analysis
- Henry H. K. Tang
- Conal E. Murray
- et al.
- 2007
- IEEE TNS
Ni-Pt silicide formation through Ti mediating layers
- Paul Besser
- Christian Lavoie
- et al.
- 2007
- Microelectronic Engineering
Mechanics of microelectronics structures as revealed by X-ray diffraction
- Conal E. Murray
- H. Yan
- et al.
- 2007
- Powder Diffraction
Submicron mapping of strained silicon-on-insulator features induced by shallow-trench-isolation structures
- Conal E. Murray
- M. Sankarapandian
- et al.
- 2007
- Applied Physics Letters
Mapping local strain in thin film/substrate systems using x-ray microdiffraction topography
- Hanfei Yan
- Conal E. Murray
- et al.
- 2007
- Applied Physics Letters
Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope
- Oliver C. Wells
- L. Gignac
- et al.
- 2006
- Scanning
Mechanics of edge effects in anisotropic thin filmsubstrate systems
- 2006
- Journal of Applied Physics