Measurements of water distribution in thin lithographic films
- Bryan D. Vogt
- Christopher L. Soles
- et al.
- 2004
- Microlithography 2004
Conference paper
Publications
28 results for Wen-Li Wu
Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
- Tengjiao Hu
- Ronald L. Jones
- et al.
- 2004
- Journal of Applied Physics
PaperFormation of deprotected fuzzy blobs in chemically amplified resists
- Ronald L. Jones
- Tengjiao Hu
- et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics
PaperInterfacial effects on moisture absorption in thin polymer films
- Bryan D. Vogt
- Christopher L. Soles
- et al.
- 2004
- Langmuir
PaperStructural characterization of porous low-k thin films prepared by different techniques using x-ray porosimetry
- Hae-Jeong Lee
- Christopher L. Soles
- et al.
- 2004
- Journal of Applied Physics
PaperBrillouin Scattering Studies of Polymeric Nanostructures
- R. Hartschuh
- Y. Ding
- et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics
PaperPolymer dynamics and diffusive properties in ultra-thin photoresist films
- Christopher L. Soles
- Ronald L. Jones
- et al.
- 2003
- Microlithography 2003
Conference paperX-ray absorption spectroscopy to probe interfacial issues in photolithography
- Joseph L. Lenhart
- Daniel A. Fischer
- et al.
- 2003
- Microlithography 2003
Conference paperPolyelectrolyte effects in model photoresist developer solutions: Roles of base concentration and added salts
- Vivek M. Prabhu
- Ronald L. Jones
- et al.
- 2003
- Microlithography 2003
Conference paperDeprotection volume characteristics and line edge morphology in chemically amplified resists
- Ronald L. Jones
- Tengjiao Hu
- et al.
- 2003
- Microlithography 2003
Conference paper