Systematic studies on reactive ion etch-induced deformations of organic underlayers
- Martin Glodde
- Sebastian Engelmann
- et al.
- 2011
- SPIE Advanced Lithography 2011
Publications
33 results for Anuja De Silva
Nanoscale three-dimensional patterning of molecular resists by scanning probes
- David Pires
- James L. Hedrick
- et al.
- 2010
- Science
A fundamental study on dissolution behavior of high-resolution molecular glass photoresists
- Anuja De Silva
- Linda K. Sundberg
- et al.
- 2008
- Chemistry of Materials