Publications

80 results for Marinus Hopstaken

Etching of iridium thin films in chlorine- and fluorine-based inductively coupled plasmas
- - Juliano Borges
  - Hongwen Yan
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Disorder-Induced Magnetotransport Anomalies in Amorphous and Textured Co_{1- x}Si_x Semimetal Thin Films
- - Alan Molinari
  - Federico Balduini
  - et al.
- 2023
- ACS Applied Electronic Materials
Characterization of TSV etch from a sustainability standpoint
- - Osakpolo Isowamwen
  - Nathan Marchack
  - et al.
- 2023
- SPIE Advanced Lithography 2023
New Phase-Change Materials by Atomic-Level Engineering the Dopants for Extremely Low V_thDrift at 85 °C and High Endurance 3D Crosspoint Memory : IBM/Macronix PCRAM Joint Project
- - Huai-Yu Cheng
  - A. Grun
  - et al.
- 2022
- IEDM 2022
Study of surface interactions for encapsulation of phase change memory materials
- - L. Buzi
  - D. Koty
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Process-Induced ReRAM Performance Improvement of Atomic Layer Deposited HfO2 for Analog In-Memory Computing Applications
- - Steven Consiglio
  - H. Higuchi
  - et al.
- 2021
- IMCS 2021
Atomic Layer Deposition of Tungsten Oxide Using Nitrogen Dioxide: A Comparative Study with Other Oxygen Sources
- - Damon B. Farmer
  - Matthew Copel
  - et al.
- 2021
- Chemistry of Materials
Investigating microwave loss of SiGe using superconducting transmon qubits
- - Martin Sandberg
  - Vivekananda P. Adiga
  - et al.
- 2021
- Applied Physics Letters
Effect of surface temperature on GeSbTe damage formation during plasma processing
- - L. Buzi
  - J. M. Papalia
  - et al.
- 2021
- SPIE Advanced Lithography 2021
High-speed CMOS-compatible III-V on Si membrane photodetectors
- - Yannick Baumgartner
  - Daniele Caimi
  - et al.
- 2020
- Optics Express