Publications

66 results for Geraud Dubois

Post porosity plasma protection: Scaling of efficiency with porosity
- - Theo Frot
  - Willi Volksen
  - et al.
- 2012
- Advanced Functional Materials
New classes of ULK dielectrics with superior thermomechanical properties
- - Yusuke Matsuda
  - Sean W. King
  - et al.
- 2011
- ADMETA 2011
Planar collimated illumination system using nano-hybrid low index materials
- - Yoichi Taira
  - Hidetoshi Numata
  - et al.
- 2011
- FiO 2011
Future of PECVD and spin-on ultra low-k materials
- - Willi Volksen
  - Theo Frot
  - et al.
- 2011
- IITC/MAM 2011
Post Porosity Plasma Protection a new approach to integrate k 2.2 porous ULK materials
- - Theo Frot
  - Willi Volksen
  - et al.
- 2011
- IITC/MAM 2011
A Manufacturing grade, porous oxycarbosilane spin-on dielectric candidate with K 2.0
- - Willi Volksen
  - Teddie P. Magbitang
  - et al.
- 2011
- JES
Application of the protection/deprotection strategy to the science of porous materials
- - Theo Frot
  - Willi Volksen
  - et al.
- 2011
- Advanced Materials
Cryogenic plasmas for controlled processing of nanoporous materials
- - Francesca Iacopi
  - Jai Hyuk Choi
  - et al.
- 2011
- Physical Chemistry Chemical Physics
Future of PECVD and spin-on low-k materials
- - Geraud Dubois
- 2010
- ADMETA 2010
Breakthrough reduction of low-k damage with cryoplasma ashing
- - Francesca Iacopi
  - Jai Hyuk Choi
  - et al.
- 2010
- ADMETA 2010