Dark field Double Dipole Lithography (DDL) for back-end-of-line processes
- M. Burkhardt
- Sean Burns
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Publications
34 results for Martin Burkhardt
Use of starburst patterns in optical lithography
- M. Burkhardt
- Cyrus Tabery
- 2007
- SPIE Advanced Lithography 2007
Conference paperDark field double dipole lithography (DDL) for 45nm node and beyond
- Stephen Hsu
- Martin Burkhardt
- et al.
- 2006
- Photomask and Next-Generation Lithography Mask Technology 2006
Conference paperPatterning and characterization of large-area quantum wire arrays
- K. Ismail
- M. Burkhardt
- et al.
- 1991
- Applied Physics Letters
Paper