Publications

3 results for Karen Petrillo

High Volume Manufacturing Innovations for Metal-Oxide Resist Patterning
- - Nicholas Latham
  - Jennifer Church
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Effect of composition uniformity in the polymer chain of EUV photoresist on lithographic performance
- - Euijin Ko
  - Yoorim Jang
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Exploration of pillar local CDU improvement options for AI applications
- - Charlie Liu
  - Hao Tang
  - et al.
- 2020
- SPIE Advanced Lithography 2020