From Lab to Fab - In-line SIMS for Process Control in Nanosheet Gate-All-Around Device Manufacturing
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- 2024
- SPIE Advanced Lithography + Patterning 2024
Conference paper
Publications
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- Thomas Picunko
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- 2023
- IEDM 2023
Invited talkOpportunities of topological semimetals as novel material for computing. Experimental transport studies and devices
- Heinz Schmid
- Alan Molinari
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- 2023
- MRS Spring Meeting 2023
Invited talkNew Phase-Change Materials by Atomic-Level Engineering the Dopants for Extremely Low Vth Drift at 85oC and High Endurance 3D Crosspoint Memory
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- Alexander Grun
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- IEDM 2022
Conference paper