Publications

8 results for Amr Abdo

Experiments using automated sample plan selection for OPC modeling
- - Ramya Viswanathan
  - Om Jaiswal
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Automated sample plan selection for OPC modeling
- - Nathalie Casati
  - Maria Gabrani
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Using custom features to check OPC model performance
- - Amr Abdo
  - Ramya Viswanathan
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
The feasibility of using image parameters for test pattern selection during OPC model calibration
- - Amr Abdo
  - Ramya Viswanathan
- 2010
- SPIE Advanced Lithography 2010
Improvements in accuracy of dense OPC models
- - Chidam Kallingal
  - James Oberschmidt
  - et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
The comparison of OPC performance and run time for dense versus sparse solutions
- - Amr Abdo
  - Ian Stobert
  - et al.
- 2008
- SPIE Advanced Lithography 2008
The effect of the OPC parameters on the performance of the OPC model
- - Amr Abdo
  - Ahmed Seoud
  - et al.
- 2007
- SPIE Photomask Technology + EUV Lithography 2007
The effect of OPC optical and resist model parameters on the model accuracy, run time, and stability
- - Amr Abdo
  - Rami Fathy
  - et al.
- 2006
- SPIE Photomask Technology 2006