E-beam inspection throughput acceleration via Targeted Critical Area Inspection
- Oliver D. Patterson
- Rasit O Topaloglu
- et al.
- 2015
- ASMC 2015
Conference paper
Publications
12 results for Oliver D. Patterson
The merits of high landing energy for E-beam inspection
- Oliver D. Patterson
- Richard Hafer
- et al.
- 2015
- ASMC 2015
Conference paperApplication of E-beam hot spot inspection for early detection of systematic patterning problems to a FinFET technology
- Deborah A. Ryan
- Oliver D. Patterson
- et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS
PaperE-beam hot spot inspection for early detection of systematic patterning problems for a 22 nm SOI technology
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2014
- IEEE Trans Semicond Manuf
PaperDetection of sub-design rule physical defects using E-beam inspection
- Oliver D. Patterson
- Julie Lee
- et al.
- 2013
- IEEE Trans Semicond Manuf
PaperEarly detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2013
- ASMC 2013
Conference paperEarly detection of electrical defects in deep trench capacitors using voltage contrast inspection
- Brian Donovan
- Oliver D. Patterson
- et al.
- 2013
- ASMC 2013
Conference paperE-beam inspection for detection of sub-design rule physical defects
- Oliver D. Patterson
- Julie Lee
- et al.
- 2012
- ASMC 2012
Conference paperAutomated SEM Offset using programmed defects
- Oliver D. Patterson
- Andrew Stamper
- et al.
- 2011
- ASMC 2011
Conference paperMethodology for trench capacitor etch optimization using voltage contrast inspection and special processing
- Oliver D. Patterson
- Xing J. Zhou
- et al.
- 2010
- ASMC 2010
Conference paper