PVD prepared molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2016
- SPIE Advanced Lithography 2016
Publications
81 results for Urs Dürig
Thermal probe nanolithography for novel photonic devices
- Felix Holzner
- Philip Paul
- et al.
- 2015
- IPRSN 2015
Precision positioning for thermal scanning probe lithography
- Philip Paul
- Simon Züst
- et al.
- 2015
- EUSPEN 2015
Tailored molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2015
- SPIE Advanced Lithography 2015
Molecular glass resists for scanning probe lithography
- Christian Neuber
- Andreas Ringk
- et al.
- 2014
- SPIE Advanced Lithography 2014
Thermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
Scanning near‐field optical microscopy (SNOM)
- D. Pohl
- U.Ch. Fischer
- et al.
- 2011
- Journal of Microscopy
Force sensing in scanning tunnelling microscopy: observation of adhesion forces on clean metal surfaces
- U. Dürig
- O. Züger
- et al.
- 2011
- Journal of Microscopy
Topographic patterning by voltage-assisted tribocharging of a polymer
- A. Kleiner
- O. Marti
- et al.
- 2011
- Journal of Applied Physics
Probe based surface modification of polymers below 30 nm pitch
- A.W. Knoll
- D. Wiesmann
- et al.
- 2010
- Journal of Nanoscience and Nanotechnology