3D Chip stacking with 50 μm pitch lead-free micro-c4 interconnectionsJoana MariaBing Danget al.2011ECTC 2011
CMOS compatible thin wafer processing using temporary mechanical wafer, adhesive and laser release of thin chips/wafers for 3D integrationBing DangPaul Andryet al.2010ECTC 2010
Reliability of a 300-mm-compatible 3DI technology based on hybrid Cu-adhesive wafer bondingR.R. YuF. Liuet al.2009VLSI Technology 2009
Reliability testing of through-silicon vias for high-current 3D applicationsSteven L. WrightPaul S. Andryet al.2008ECTC 2008
Characterization of stacked die using die-to-wafer integration for high yield and throughputK. SakumaP. Andryet al.2008ECTC 2008
Comparison of electromigration performance for Pb-free solders and surface finishes with Ni UBMMinhua LuPaul Lauroet al.2008ECTC 2008
3D chip-stacking technology with through-silicon vias and low-volume lead free interconnectionsKatsuyuki SakumaPaul S. Andryet al.2008IBM J. Res. Dev