Publications

40 results for Steven J. Holmes

Scalable Nanostructured Carbon Electrode Arrays for Enhanced Dopamine Detection
- - Silvia Demuru
  - Luca Nela
  - et al.
- 2018
- ACS Sensors
Reducing line edge roughness in si and sin through plasma etch chemistry optimization for photonic waveguide applications
- - Nathan Marchack
  - Marwan Khater
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Critical BEOL aspects of the fabrication of a thermally-assisted MRAM device
- - E.J. O'sullivan
  - Daniel C. Edelstein
  - et al.
- 2015
- ECS Meeting 2015 Phoenix
Development of KrF hybrid resist for a dual isolation application
- - Sen Liu
  - Steven Holmes
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Directed self-assembly process implementation in a 300mm pilot line environment
- - Chi-Chun Liu
  - I. Cristina Estrada-Raygoza
  - et al.
- 2013
- SPIE Advanced Lithography 2013
High performance extremely thin SOI (ETSOI) hybrid CMOS with Si channel NFET and strained SiGe channel PFET
- - K. Cheng
  - A. Khakifirooz
  - et al.
- 2012
- IEDM 2012
Strain engineered extremely thin SOI (ETSOI) for high-performance CMOS
- - A. Khakifirooz
  - Kangguo Cheng
  - et al.
- 2012
- VLSI Technology 2012
Directed self-assembly defectivity assessment. Part II
- - Chris Bencher
  - He Yi
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Sub-25nm FinFET with advanced fin formation and short channel effect engineering
- - Tenko Yamashita
  - Veeraraghvan S. Basker
  - et al.
- 2011
- VLSI Technology 2011
ETSOI CMOS for system-on-chip applications featuring 22nm gate length, sub-100nm gate pitch, and 0.08μm² SRAM cell
- - Kangguo Cheng
  - A. Khakifirooz
  - et al.
- 2011
- VLSI Technology 2011