High-temperature degradation of NiSi films: Agglomeration versus NiSi 2 nucleation
- D. Deduytsche
- C. Detavernier
- et al.
- 2005
- Journal of Applied Physics
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52 results for C. Detavernier
CoSi2 formation in the presence of Ti, Ta or W
- C. Detavernier
- C. Lavoie
- et al.
- 2004
- Thin Solid Films
Texture of suicide films on Si(001) : The occurrence of axiotaxy in cubic CoSi 2, tetragonal α-FeSi 2 and orthorhombic NiSi
- C. Detavernier
- C. Lavoie
- 2004
- ICSICT 2004
Axiotaxy of CoSi 2 thin films on Si(100) substrates and the effects of Ti alloying
- Ahmet S. Özean
- Karl F. Ludwig Jr.
- et al.
- 2004
- Journal of Applied Physics
Texture of tetragonal α-FeSi2 films on Si(001)
- C. Detavernier
- C. Lavoie
- et al.
- 2004
- Physical Review B - CMMP
Low-temperature formation of CoSi 2 in the presence of Au
- C. Detavernier
- C. Lavoie
- et al.
- 2004
- Journal of Applied Physics
Influence of Pt addition on the texture of NiSi on Si(001)
- C. Detavernier
- C. Lavoie
- 2004
- Applied Physics Letters
An off-normal fibre-like texture in thin films on single-crystal substrates
- C. Detavernier
- A.S. Özcan
- et al.
- 2003
- Nature
Does line edge roughness matter?: FEOL and BEOL perspectives
- Qinghuang Lin
- Chuck Black
- et al.
- 2003
- Microlithography 2003
Thermodynamics and kinetics of room-temperature microstructural evolution in copper films
- C. Detavernier
- S.M. Rossnagel
- et al.
- 2003
- Journal of Applied Physics