Publications

52 results for C. Detavernier

High-temperature degradation of NiSi films: Agglomeration versus NiSi ₂ nucleation
- - D. Deduytsche
  - C. Detavernier
  - et al.
- 2005
- Journal of Applied Physics
CoSi₂ formation in the presence of Ti, Ta or W
- - C. Detavernier
  - C. Lavoie
  - et al.
- 2004
- Thin Solid Films
Texture of suicide films on Si(001) : The occurrence of axiotaxy in cubic CoSi ₂, tetragonal α-FeSi ₂ and orthorhombic NiSi
- - C. Detavernier
  - C. Lavoie
- 2004
- ICSICT 2004
Axiotaxy of CoSi ₂ thin films on Si(100) substrates and the effects of Ti alloying
- - Ahmet S. Özean
  - Karl F. Ludwig Jr.
  - et al.
- 2004
- Journal of Applied Physics
Texture of tetragonal α-FeSi₂ films on Si(001)
- - C. Detavernier
  - C. Lavoie
  - et al.
- 2004
- Physical Review B - CMMP
Low-temperature formation of CoSi ₂ in the presence of Au
- - C. Detavernier
  - C. Lavoie
  - et al.
- 2004
- Journal of Applied Physics
Influence of Pt addition on the texture of NiSi on Si(001)
- - C. Detavernier
  - C. Lavoie
- 2004
- Applied Physics Letters
An off-normal fibre-like texture in thin films on single-crystal substrates
- - C. Detavernier
  - A.S. Özcan
  - et al.
- 2003
- Nature
Does line edge roughness matter?: FEOL and BEOL perspectives
- - Qinghuang Lin
  - Chuck Black
  - et al.
- 2003
- Microlithography 2003
Thermodynamics and kinetics of room-temperature microstructural evolution in copper films
- - C. Detavernier
  - S.M. Rossnagel
  - et al.
- 2003
- Journal of Applied Physics