Publications

148 results for Thomas M. Shaw

Effect of H₂O on TDDB for a range of ULK ILD materials with varying damage resistance for robust and weak liners
- - Eric G. Liniger
  - Robert B. Laibowitz
  - et al.
- 2016
- IRPS 2016
Towards an appropriate acceleration model for beol tddb
- - Ramachandran Muralidhar
  - Eric G. Liniger
  - et al.
- 2016
- IRPS 2016
Ultrathin conformal multilayer SiNO dielectric cap for capacitance reduction in Cu/low k interconnects
- - Deepika Priyadarshini
  - Son Van Nguyen
  - et al.
- 2016
- IITC/AMC 2016
The strength of BEOL structures fabricated using low K materials and its impact on CPI failures
- - Thomas M. Shaw
  - Xiao Hu Liu
  - et al.
- 2015
- IIRW 2015
Impedance spectroscopy studies of moisture uptake in low-k dielectrics and its relation to reliability
- - A. Raja
  - Robert B. Laibowitz
  - et al.
- 2015
- Microelectronic Engineering
First realization of the piezoelectronic stress-based transduction device
- - Josephine B. Chang
  - Hiroyuki Miyazoe
  - et al.
- 2015
- Nanotechnology
The piezoelectronic stress transduction switch for very large-scale integration, low voltage sensor computation, and radio frequency applications
- - I.-B. Magdû
  - Xiao Hu Liu
  - et al.
- 2015
- Applied Physics Letters
Pathway to the Piezoelectronic Transduction Logic Device
- - Paul Solomon
  - Brian A. Bryce
  - et al.
- 2015
- Nano Letters
Through-Cobalt Self Forming Barrier (tCoSFB) for Cu/ULK BEOL: A novel concept for advanced technology nodes
- - Takeshi Nogami
  - Benjamin D. Briggs
  - et al.
- 2015
- IEDM 2015
Spatial mapping of non-uniform time-to-breakdown and physical evidence of defect clustering
- - Ernest Y. Wu
  - Baozhen Li
  - et al.
- 2014
- VLSI Technology 2014