Publications

28 results for L. Liebmann

Integrating DfM components into a cohesive design-to-silicon solution
- - Lars Liebmann
  - Dan Maynard
  - et al.
- 2005
- Microlithography 2005
High-performance circuit design for the RET-enabled 65nm technology node
- - Lars Liebmann
  - Arnold Barish
  - et al.
- 2004
- AMM 2004
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Layout Optimization at the pinnacle of Optical Lithography
- - Lars Liebmann
  - Greg Northrop
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Lithography 2003
CAD computation for manufacturability: Can we save VLSI technology from itself?
- - Mark Lavin
  - Lars Liebmann
- 2002
- ICCAD 2002
Methodology for generating exposure tool specification for alternating phase shift mask application for 70 nm node
- - Kafai Lai
  - Gregg Gallatin
  - et al.
- 2002
- SPIE Advanced Lithography 2002
Enabling the 70 nm technology node with 193 nm altPSM lithography
- - Lars Liebmann
  - Jennifer Lund
  - et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
CAD computation for manufacturability: Can we save VLSI technology from itself?
- - Mark Lavin
  - Lars Liebmann
- 2002
- IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers
Application of automated design migration to alternating phase shift mask design
- - F.-L. Heng
  - L. Liebmann
  - et al.
- 2001
- ISPD 2001