Implementing amine-based cleaning chemical for post CMP cleaning of Cu for BEOL interconnect and Hybrid bonding Applications
- Arunkumar G V
- Wei-Tsu Tseng
- et al.
- 2026
- ASMC 2026
Conference paper
Publications
3 results for Donald Canaperi
Metal Corrosion Mitigation in Fine Geometries during Chemical Mechanical Planarization
- Wei-Tsu Tseng
- Emiko Motoyama
- et al.
- 2024
- ECS Spring Meeting 2024
Invited talkFlowable Chemical Vapor Deposition of Lightly Porous Low k SiCOH Dielectrics—Remote Plasma Deposition Processing, Film Analysis and Gap-Fill Application in Nano Device Fabrication
- Son Nguyen
- Thomas Haigh
- et al.
- 2022
- MRS Fall Meeting 2022
Talk