Influence of alloying elements on the phase formation of ultrathin Ni (<10nm) on Si(001) substrates
- F.A. Geenen
- K. Van Stiphout
- et al.
- 2015
- IITC/MAM 2015
Publications
198 results for Christian Lavoie
Resistivity of copper interconnects beyond the 7 nm node
- Adam Pyzyna
- Robert L. Bruce
- et al.
- 2015
- VLSI Technology 2015
Challenges of nickel silicidation in CMOS technologies
- Nicolas Breil
- Christian Lavoie
- et al.
- 2015
- Microelectronic Engineering
Compositional dependence of the optical conductivity of Ni1 - XPtx alloys (0 < x < 0.25) determined by spectroscopic ellipsometry
- Lina S. Abdallah
- Stefan Zollner
- et al.
- 2014
- Thin Solid Films
On the formation and structural properties of hexagonal rare earth (Y, Gd, Dy, Er and Yb) disilicide thin films
- F.A. Geenen
- W. Knaepen
- et al.
- 2014
- Journal of Alloys and Compounds
Optical conductivity of Ni1-xPtxSi monosilicides (0 < x < 0.3) from spectroscopic ellipsometry
- Lina S. Abdallah
- Stefan Zollner
- et al.
- 2014
- JVSTB
Formation and texture of palladium germanides studied by in situ X-ray diffraction and pole figure measurements
- F.A. Geenen
- W. Knaepen
- et al.
- 2014
- Thin Solid Films
Optical conductivity of Ni1- XPtx alloys (0< x <0.25) from 0.76 to 6.6 eV
- Lina S. Abdallah
- Tarek M. Tawalbeh
- et al.
- 2014
- AIP Advances
Thin film Ni-Si solid-state reactions: Phase formation sequence on amorphized Si
- Pierre Turcotte-Tremblay
- Matthieu Guihard
- et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf 1-xZrxO2 gate dielectrics deposited by a cyclical deposition and annealing scheme
- Relja Vasić
- Steven Consiglio
- et al.
- 2013
- Journal of Applied Physics