Publications

2 results for Emiko Motoyama

Implementing amine-based cleaning chemical for post CMP cleaning of Cu for BEOL interconnect and Hybrid bonding Applications
- - Arunkumar G V
  - Wei-Tsu Tseng
  - et al.
- 2026
- ASMC 2026
Conference paper
Metal Corrosion Mitigation in Fine Geometries during Chemical Mechanical Planarization
- - Wei-Tsu Tseng
  - Emiko Motoyama
  - et al.
- 2024
- ECS Spring Meeting 2024
Invited talk