Publications

2 results for H. Palm

Dry etch challenges of 0.25 μm dual damascene structures
- - R.F. Schnabel
  - D. Dobuzinski
  - et al.
- 1997
- Vide: Science, Technique et Applications
Paper
Advanced metallization technology for 256M DRAM
- - P. Kücher
  - H. Aochi
  - et al.
- 1995
- Applied Surface Science
Paper