Dry etch challenges of 0.25 μm dual damascene structures

Paper

01 Dec 1997

Abstract

No abstract available.

Paper

H.R. Brown

International Conference on the Role of Interfaces in Advanced Materials Design, Processing and Performance 1993

Paper

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Journal of Materials Research

Workshop paper

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ACL 2024

Conference paper

A. Skumanich, M. Jurich, et al.

OTF 1993